5 edition of Silicides found in the catalog.
Includes bibliographical references and index.
|Other titles||16th Course of the International School of Solid State Physics, Silicides, fundamentals and applications|
|Statement||editors, Leo Miglio & Francois d"Heurle.|
|Series||The science and culture series. Materials science ;, 1, Science and culture series (Singapore)., 1.|
|Contributions||Miglio, L., D"Heurle, F. M.|
|LC Classifications||QD181.S6 I58 1999|
|The Physical Object|
|Pagination||viii, 377 p. :|
|Number of Pages||377|
|LC Control Number||2001280362|
Transition metal silicides (TMSis) are attractive advanced functional materials due to their low electronic resistivity, high melting-point, excellent mechanical properties and thermal stability. However, the overall performances of binary silicides are not satisfactory enough to meet the requirements of man Silicides for VLSI Applications - Kindle edition by Murarka, Shyam P.. Download it once and read it on your Kindle device, PC, phones or tablets. Use features like bookmarks, note taking and highlighting while reading Silicides for VLSI › Books › Engineering & Transportation › Engineering.
COVID Resources. Reliable information about the coronavirus (COVID) is available from the World Health Organization (current situation, international travel).Numerous and frequently-updated resource results are available from this ’s WebJunction has pulled together information and resources to assist library staff as they consider how to handle coronavirus Back to book. chapter 10 Silicides. With Christian Lavoie, Francois M. d’Heurle, Shi-Li Zhang. The goals of this chapter are to give an overview of silicide contacts to microelectronic devices and to present many important material advantages and limitations for microelectronic applications. A simple web search on the current subject easily
Get this from a library! Semiconducting silicides. [V E Borisenko;] -- "This book first summarizes the formation methods and properties of semiconducting silicides, discussing new prospects for silicon-based micro-and nano-electronics, optoelectronics and Physical Properties of Surface Silicides. E.G. Michel. Universidad Autonoma de Madrid, Departamento de Física de la Materia Condensada, , Madrid, Spain Search for more papers by this author. Book Editor(s): Klaus Wandelt. University of Bonn, Institute of Physical and Theoretical Chemistry, Wegelerstr D‐, Bonn, Germany
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In this chapter the silicides are defined. They are the product of the reaction between silicon and metal. Almost all metals can react with silicon forming various silides. Of particular interest are the MSi 2 (M stands for metal) silicides.
In this book the CoSi 2, NiSi 2, FeSi 2, WSi 2, TiSi 2 and MoSi 2 are considered either as bulk or thin This book chapter will review recent progress in the mechanism of formation, stress, texture, and the effect of Silicides book elements for the silicides and germanides closely related to the development of the experimental techniques, including in situ techniques (XRD, sheet resistance, DSC) and atom probe tomography (APT).
The book gives a comprehensive presentation and analysis of properties and methods of formation of semiconducting silicides Fundamental electronic, optical and transport properties of the silicides collected from recent publications will help the reader to make a choice for their application in new generations of solid-state devices The book gives a comprehensive presentation and analysis of properties and methods of formation of semiconducting silicides Fundamental electronic, optical and transport properties of the silicides collected from recent publications will help the reader to make a choice for their application in new generations of solid-state devices A comprehensive presentation of thermodynamic and kinetic Silicides are also important for other applications (thermoelectric devices and structural applications, such as jet engines), but it is not easy to find an updated reference containing both their basic properties, either chemical or physical, and the latest 16th Course of the International School of Solid State Physics, Silicides book › Books › Engineering & Transportation › Engineering.
Special Book Collections Special Book Collections Specialized Collections Some aspects of the diffusion-controlled growth and oxidation of metal-silicides are presented in this volume of the journal. Purchase this book: eBook.
$ Print. $ Abstract. To improve strength and creep resistance of MoSi 2, WSi 2 and TiSi 2 reinforcing phases are added to produce silicide composites. Their effect depends on size and shape. Common composites of these silicides are based on addition of SiC, Si 3 N 4 and other silicides such as TaSi effective silicide added as a strengthener to MoSi 2 is Mo 5 Si low fracture toughness below the Other concepts and materials discussed in the book are the use of silicon material in different processes of VLSI, nitrides, silicides, metallization, and plasma.
This handbook is very useful to students of engineering and physics. Also, researchers (in physics and chemistry of materials and processes), device designers, and system designers CHIH-HANG TUNG is a senior member of the technical staff and Project Leader at the Institute of Microelectronics in Singapore.
GEORGE T. SHENG was the first to develop cross-sectioning samples of TEM studies of semiconductor devices and has been involved with many other groundbreaking projects at Bell Labs. CHIH-YUAN LU is Chairman and CEO of Ardentec Corp., an ULSI testing This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications.
It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture :// This book chapter will review recent progress in the mechanism of formation, stress, texture, and the effect of alloy elements for the silicides and germanides closely related to the development of the experimental techniques, including in situ techniques (XRD, sheet resistance, DSC) and atom probe tomography (APT).
Silicides Fundamentals And Applications Get Download PDF book full free. Silicides Fundamentals And Applications available for download and read online :// This book provides a comprehensive review of the current state of the art in silicon compounds for thermoelectric applications.
Silicides are materials with good initial thermoelectric properties, which can be enhanced through tuning of their micro- and :// Annotation Experts from Europe, the US, and China review the research to date in metal silicides, offering 42 individually commissioned reviews of numeric data on the silicides of both transition and rare earth metals and commentary on the latest research.
Reviews are organized along the main categories of materials properties, with sections on structural and thermal properties; growth and K.S.
Kumar, in Encyclopedia of Materials: Science and Technology, 2 Silicides as High-temperature Coatings. Silicide coatings have proved to be invaluable in providing high-temperature oxidation resistance in nickel-based alloys, steels, and most importantly in refractory metals and alloys.
The excellent hot corrosion resistance of silicides has been well established (e.g., degradation Nickel silicides (Ni–Si alloys) are applied to reduce the contact resistance between the Si substrates and electrodes in CMOS structures, and to improve About this book Covering interface science from a novel surface science perspective, this seven-volume handbook offers a comprehensive overview of both these and numerous other :// Text Book: Silicon VLSI TechnologySilicon VLSI Technology Fundamentals, Practice and Modeling Authors: J D Plummer M D DealAuthors: J.
Plummer, M. Deal, Silicides – S iki i ti th h h ll j ti (itt f)Spiking or migration through shallow junctions (emitter of npn) – ~zyang/Teaching/SpringECE/Downloads/ In book: digital Encyclopedia of Applied Physics.
Cite this publication. Jeffrey P. Gambino. Silicides are widely used in silicon integrated circuits as contacts and interconnections. In many Science Bulletin (Sci.
Bull., formerly known as Chinese Science Bulletin) is a multidisciplinary academic journal supervised by the Chinese Academy of Sciences (CAS) and co-sponsored by the CAS and the National Natural Science Foundation of China (NSFC).Sci.
Bull. is a semi-monthly international journal publishing high-caliber peer-reviewed research on a broad range of natural sciences and. Silicides are intermetallic compounds with Si and many metals form stable silicides. The interfacial reactions between various metals and Si have been investigated for many years and some silicides have been developed for contact and gate materials in Si ultra-large-scale-integrated (ULSI) applications .
Refractory materials containing Al 2 O 3, borides or silicides other than MoSi 2 are used in furnace construction, and as materials for nozzles, leading edges, shaft seals, dies and cutting and sharpening tools.
2. Resistance to Oxidation and Corrosion. MoSi 2 is the most stable of the :// While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at ://